Richard F Spanier

Richard F. Spanier served as chairman and president of Rudolph Technologies, Inc., (previously Rudolph Research) from 1966 to 1996 and, although retired, continues to serve as chairman emeritus of its board of directors, chairman of Rudolph Research Analytical Corporation, and chairman and president of the Lord Rudolph Spanier Foundation, a non-profit foundation for Christian purposes. Before joining Rudolph, Spanier taught Chemistry at Stevens Institute of Technology and Fairleigh Dickenson University. During the course of his career, Spanier guided the invention and development of metrology products that are currently used throughout the semiconductor industry. Spanier and Rudolph Technologies received the Industrial Research 100 Award for the AutoEL, the first fully automated ellipsometer. In 1990, he invented and received a patent for simultaneous multiple angle of incidence ellipsometry, which extended the range of applications easily accessible to ellipsometers for very thin films. Spanier introduced picosecond ultrasonic laser sonar (PULSE) technology in 1997. He received the Lifetime Achievement Award from Semiconductor Materials and Equipment International for his contributions to the semiconductor and semiconductor equipment industries. Spanier served on the Board of Adjustment of Chester, New Jersey, for 14 years, including 8 years as chairman. He currently is a member of the planning commission for the Town of Cambridge, Vermont, and the Board of Deacons of the Second Congregational Church of Jeffersonville. Spanier holds a Ph.D. in physical chemistry from Stevens Institute of Technology.